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洁净室等级标准

洁净室等级标准

洁净室等级标准

JIEJINGSHIDENGJIBIAOZHUN(GUONEIHEGUOWAIBIAOZHUNDUIBI)

ISO/DIS 14644-1 JIEJINGSHIHEJIEJINGQUANKONGQIZHONGXUANFULIZINONGDUDEFENJI  

ISOFENJI DAYUDENGYUBIAOZHONGSUOLIELIJINGXUANFULIZIZUIDAYUNXUNONGDU(KE/m3)

0.1μm 0.2μm 0.3μm 0.5μm 1μm 5μm

ISO1JI 10 2        

ISO2JI 100 24 10 4    

ISO3JI 1000 237 102 35 8  

ISO4JI 10000 2370 1020 352 83  

ISO5JI 100000 23700 10200 3520 832 29

ISO6JI 1000000 237000 102000 35200 8320 293

ISO7JI       352000 83200 2930

ISO8JI       3520000 832000 29300

ISO9JI       35200000 8320000 293000


《YAOPINSHENGCHANZHILIANGGUANLIGUIFAN》(1992NIANXIUDING)  

JIEJINGJIBIE HUOLISHU/LIFANGMI HUOWEISHENGWUSHU/LIFANGMI

≥0.5μm ≥5μm

100 JI ≤3,500 0 ≤5

10,000 JI ≤350,000 ≤2,000 ≤100

100,000JI ≤3,500,000 ≤20,000 ≤500


JIEJINGSHOUSHUBUJIEJINGYONGFANGDENGJIBIAOZHUN  

DENGJI CHENJIANG(FUYOU)XIJUNZUIDAPINGJUNNONGDU BIAOMIANZUIDARANJUNMIDU KONGQIJIEJINGDUJIBIE

SHOUSHUQU ZHOUBIANQU SHOUSHUQU ZHOUBIANQU

I 0.2GE/30minΦ90MIN(5GE/ m3) 0.4GE/30minΦ90MIN(10GE/ m3) 5GE/cm2 100JI 1000JI

II 0.75GE/30minΦ90MIN(25GE/ m3) 1.5GE/30minΦ90MIN(50GE/ m3) 5GE/cm2 1000JI 10000JI

III 2GE/30minΦ90MIN(75GE/ m3) 4GE/30minΦ90MIN(150GE/ m3) 5GE/cm2 10000JI 100000JI

IV 5GE/30min,Φ90MIN(175GE/ m3) 5GE/cm2 300000JI


MEIGUOLIANBANGBIAOZHUN209E  

DENGJIMINGCHENG DENGJIXIANZHI

0.1μm 0.2μm 0.3μm 0.5μm 5μm

GUOJIDANWEI YINGZHIDANWEI /m3 /ft3 /m3 /ft3 /m3 /ft3 /m3 /ft3 /m3 /ft3

M1   350 9.91 75.7 2.14 30.9 0.875 10.0 0.283    

M1.5 1 1240 35.0 265 7.50 106 3.00 3.53 1.00    

M2   3500 99.1 757 21.4 309 8.75 100 2.83    

M2.5 10 1240 350 2650 75.0 1060 30.0 353 10.0    

M3   35000 991 7570 214 3090 87.5 1000  28.3     

M3.5 100     26500 750 10600 300 3530 100    

M4       75700 21400 30900 875 10000 283    

M4.5 1000             35300 1000 247 7

M5               100000 2830 618 17.5

M5.5 10000             353000 10000 2470 70.0

M6               1000000 28300 6180 175

M6.5 100000             3530000 100000 24700 700

M7               10000000 283000 61800 1750


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